Skip to main content

Full text of "USPTO Patents Application 10776553"

See other formats 


Search History Transcript 

WEST Search History 



Page 1 of 1 




DATE: Tuesday, April 05, 2005 

n j o Set r\ Hit 

Hide? Query ^ 

Name ^ Count 

DB=EPABJPAB,DWPI; PLUR-YES; OP=ADJ 

□ LI (plasma or pecvd or (pe cvd)) and (ammonia or nh3) and 

(tri$lmethyl$lsilane or (trimethyl silane) or ch3sih3) ^ 



END OF SEARCH HISTORY 



http ://westbrs : 9000^in/cgi-bin/s^chhi st, pi? state=eqccfq .2. 7&f=ff search&userid=ckoslow 



4/5/05 



Search History Transcript 



Page 1 of 1 



WEST Search History 



DATE: Tuesday, April 05, 2005 

Hide? Set Name Query Hit Count 

DB=EPAB.JPAB,DWPI: PLUR=YES; OP=ADJ 

□ L7 si3nl?3$ 0 

□ L6 14 not 15 64 

□ L5 si3n4?3 3 
O L4 si3n4?3 orsi3nl?3$orsin4 67 

□ L3 (ch3 or methyl) nearS (si3n4 or silicon nitride) 27 
O L2 ?ch3?$5si3n?$4 0 

□ LI ch3?$5si3n?$4 0 

END OF SEARCH HISTORY 



http://westbrs:9000^in/cgi-bin/srchhist.pl?state=ekqs56.17.61&f=ffsearch&userid=ckoslow 



4/5/05 







L # 


Hits 


Sea.irch Text 


DBS 


1 


BRS 


L2 


0 


1 and @py<"1998" 


US- 

PGPUB; 
USPAT 


2 


BRS 


LI 


25 


plasma with (ammonia or 
"nh.sub.3") with 
(methyl$lsilane or (methyl 
silane) or ("ch,sub.3" 
"sih.sub.3") ) 


US- 

PGPUB; 
USPAT 


3 


BRS 


L3 


45 


(ammonia or "nh.sub.S.") 
with (methyl$lsilane or 
(methyl silane) or 
("ch.sub.3" "sih,sub.3") ) 


KJ 1^ A ± 


4 


BRS 


L4 


35 


3 not 1 


USPAT 


5 


BRS 


L5 


111 


(ammonia or "nh.sub.3") 
with ($3methyl$lsilane or 
($3methyl silane) or 
("ch,sub-3" "sih.sub.3") ) 


USPAT 


6 


BRS 


L6 


28 


((ammonia or "nh.sub.3") 
with ($3methyl$lsilane or 
($3methyl silane) or 
("ch,sub.3" "sih.sub.3"))) 
same plasma 


USPAT 


7 


BRS 


L7 


18 


6 not 1 




8 


BRS 


L8 


83 


5 not 6 


us- 

PGPUB; 
USPAT 


9 


BRS 


L9 


11 


8 and (pecvd or pe) 


US- 

PGPUB/ 
USPAT 



4/5/05, EAST Version: 2.0.1.4 





Type 


L # 


Hits 


Search Text 


DBS 


1 


BRS 


LI 


5 


li-weimin-$ .in. or yin- 
zhiping- $ . in . 


US- 

PGPUB ; 
USPAT 


2 


BRS 


L2 


141 


li-weimin. in. or yin- 
zhiping . in . 


us- 

PGPUB; 
USPAT 


3 


BRS 


L3 


22 


2 and ( (methyl or 
"ch.sub.3") with (si or 
"si. sub. 3" or silicon)) 


US- 

PGPUB; 
USPAT 


4 


BRS 


L4 


19 


("ch.sub.3") adj4 
(("si. sub. 3" or silicon) 
adj (nitride or "n.sub.4")) 


US- 

PGPUB; 
USPAT 


5 


BRS 


L5 


17 


4 not 3 


US- 

PGPUB ; 
USPAT 


6 


BRS 


L6 


19 


(methyl) adj 4 (("si. sub. 3" 
or silicon) adj (nitride or 
"n.sub.4") ) 


US- 

PGPUB ; 
USPAT 


7 


BRS 


L7 


19 


6 not 4 


US- 

PGPUB; 
USPAT 



4/5/05, EAST Version: 2.0.1.4 



Page 1 of 1 



FILE 'CAPLUS' ENTERED AT 12:43:13 

LI 12 S (CH3 OR METHYL) 

L2 27 S (CHS OR METHYL) 

L3 27 S {CH3 OR METHYL) 

L4 15 S L3 NOT LI 



ON 05 APR 2005 

(3A) (SILICON NITRIDE OR SI3N4) 

(5A) (SILICON NITRIDE OR SI3N4) 

(SN) (SILICON NITRIDE OR SI3N4) 



http://stnwebxas.org/cgi-bin/sdcgi?SID=307390-1892996232-200&APP=stnweb& 



4/5/05